wl瓦力游戏app下载科技全球领先的半导体AMHS整体解决方案供应商

Catalogue

AMHS Transport Equipment

Overhead Hoist Transport（OHT） Conveyor Autonomous Robot（AMR）

AMHS Storage Purge Equipment

Foup/Pod Stocker Reticle Stocker Tower Stocker Near Tool Buffer Tool Loadport Station(TLP) OHB Purge(OHBP) Reticle Cabinet Wafer Cassette Load Port Station(LPS) E-Rack

AMHS Software System

AMHS Material Control System AMHS Analysis & Monitoring System

AMHS Sensor Control

RFID Reader SmartTag Reader E84 Sensor

AMHS Storage Purge Equipment

Tool Loadport Station(TLP)

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